dc.identifier.uri |
http://dx.doi.org/10.15488/3234 |
|
dc.identifier.uri |
http://www.repo.uni-hannover.de/handle/123456789/3264 |
|
dc.contributor.author |
Rahlves, Maik
|
|
dc.date.accessioned |
2018-05-04T13:15:09Z |
|
dc.date.available |
2018-05-04T13:15:09Z |
|
dc.date.issued |
2016 |
|
dc.identifier.citation |
Rahlves, M.: Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices. In: Procedia Technology 26 (2016), S. 309-315. DOI: https://doi.org/10.1016/j.protcy.2016.08.040 |
|
dc.description.abstract |
We present a process to fabricate fully polymer based integrated optical devices which is based on maskless lithography and hot embossing. Using the maskless lithographic setup, we are able to create a hot embossing stamp in a flexible and fast manner. We demonstrate that our process is capable of creating linear optical waveguides, Y-splitters and Mach-Zehnder interferometers designed by preliminary optical simulations. The fabricated structures are analyzed with respect to optical smoothness and line edge roughness. In the future, our process will greatly enhance a fast design and fabrication of complex optical sensor structures. |
eng |
dc.language.iso |
eng |
|
dc.publisher |
Amsterdam : Elsevier |
|
dc.relation.ispartofseries |
Procedia Technology 26 |
|
dc.rights |
CC BY-NC-ND 4.0 Unported |
|
dc.rights.uri |
https://creativecommons.org/licenses/by-nc-nd/4.0/ |
|
dc.subject |
Integrated photonics |
eng |
dc.subject |
maskless lithography |
eng |
dc.subject |
waveguides |
eng |
dc.subject |
polymer photonics |
eng |
dc.subject |
hot embossing |
eng |
dc.subject.classification |
Konferenzschrift |
ger |
dc.subject.ddc |
600 | Technik
|
ger |
dc.title |
Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices |
|
dc.type |
Article |
|
dc.type |
Text |
|
dc.relation.issn |
2212-0173 |
|
dc.relation.doi |
https://doi.org/10.1016/j.protcy.2016.08.040 |
|
dc.bibliographicCitation.volume |
26 |
|
dc.bibliographicCitation.firstPage |
309 |
|
dc.bibliographicCitation.lastPage |
315 |
|
dc.description.version |
publishedVersion |
|
tib.accessRights |
frei zug�nglich |
|