Rahlves, M.: Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices. In: Procedia Technology 26 (2016), S. 309-315. DOI: https://doi.org/10.1016/j.protcy.2016.08.040
Abstract: | |
We present a process to fabricate fully polymer based integrated optical devices which is based on maskless lithography and hot embossing. Using the maskless lithographic setup, we are able to create a hot embossing stamp in a flexible and fast manner. We demonstrate that our process is capable of creating linear optical waveguides, Y-splitters and Mach-Zehnder interferometers designed by preliminary optical simulations. The fabricated structures are analyzed with respect to optical smoothness and line edge roughness. In the future, our process will greatly enhance a fast design and fabrication of complex optical sensor structures. | |
License of this version: | CC BY-NC-ND 4.0 Unported |
Document Type: | Article |
Publishing status: | publishedVersion |
Issue Date: | 2016 |
Appears in Collections: | Fakultät für Maschinenbau |
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other countries | 10 | 7.14% |
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