Enns, Y.B.; Pyatishev, E.N.; Glukhovskoy, A.: Bistable arch-like beams with modulated profile as perspective supporting structures of a microelectromenchanical actuator. In: Journal of Physics: Conference Series 917 (2017), Nr. 8, 82013. DOI:
https://doi.org/10.1088/1742-6596/917/8/082013
Abstract: |
The static mechanical properties of a bistable electromechanical drive with arcuate suspension is investigated. The behaviour of an arcuate suspension and the influence of the beam thickness modulation on the stability of both stationary states is studied experimentally and theoretically. The influence of the beam shape modulation on its potential energy was determined with finite element analysis. The simulation results were verified experimentally. In the study, the optimal modulation configuration is determined. With help of this modification the sustainability of both mechanically stable states is significantly improved.
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License of this version: |
CC BY 3.0 Unported - https://creativecommons.org/licenses/by/3.0/
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Publication type: |
Article |
Publishing status: |
publishedVersion |
Publication date: |
2017 |
Keywords english: |
Microwave devices, Modulation, Nanostructures, Optoelectronic devices, Photonics, Potential energy, Suspensions (components), Beam shapes, Beam thickness, Bistables, Electromechanical drive, Mechanically stable, Static mechanical properties, Stationary state, Supporting structure, Finite element method
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DDC: |
530 | Physik
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Controlled keywords(GND): |
Konferenzschrift
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