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dc.identifier.uri https://www.repo.uni-hannover.de/handle/123456789/13422
dc.identifier.uri https://doi.org/10.15488/13313
dc.contributor.author Schöttler, Kerstin
dc.contributor.author Rathmann, Sven
dc.contributor.author Raatz, Annika
dc.contributor.author Hesselbach, Jürgen
dc.contributor.editor Thornett, E.
dc.date.accessioned 2023-03-09T15:55:36Z
dc.date.available 2023-03-09T15:55:36Z
dc.date.issued 2007
dc.identifier.citation Schöttler, K.; Rathmann, S.; Raatz, A.; Hesselbach, J.: Automated Assembly of Hybrid Microsystems. In: Thornett, E. (Ed.): Proceedings of the 7th international conference / European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany, Vol. 2. Bedford : Euspen (European Society for Precision Engineering and Nanotechnology), 2007, S. 364-367
dc.description.abstract The paper describes the design of a system for the automated assembly of hybrid microsystems and the accuracies of the components. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process. While the object sizes reach centimeter range, they have to be assembled with an assembly accuracy of only a few micrometers. A relative positioning accuracy of 0.8 pm is reached in this process. eng
dc.language.iso eng
dc.publisher Bedford : Euspen (European Society for Precision Engineering and Nanotechnology)
dc.relation.ispartof Proceedings of the 7th international conference / European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany, Vol. 2
dc.rights Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden.
dc.subject Konferenzschrift ger
dc.subject Feinwerktechnik ger
dc.subject Mikrosystemtechnik ger
dc.subject Nanotechnologie ger
dc.subject.ddc 620 | Ingenieurwissenschaften und Maschinenbau
dc.title Automated Assembly of Hybrid Microsystems eng
dc.type BookPart
dc.type Text
dc.relation.isbn 978-0-9553082-2-2
dc.bibliographicCitation.volume 2
dc.bibliographicCitation.firstPage 364
dc.bibliographicCitation.lastPage 367
dc.description.version publishedVersion
tib.accessRights frei zug�nglich


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