Influences on the Automated Assembly of Hybrid Microsystems with High Accuracy

Abstract

Nowadays, an ongoing trend of miniaturization of products and components can be observed in nearly all application areas in the world. As for microsystems, a distinction is drawn between monolithic and hybrid microsystems. The latter group requires some kind of assembly process. For the assembly of hybrid microsystems, a high assembly accuracy in the range of a few micrometers is required. In order to reach this accuracy, an assembly system for sensor guided microassembly has been developed at the Collaborative Research Centre 516 “Design and manufacturing of active micro systems”. This paper describes the design of a system for automated assembly of hybrid microsystems. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process.