On a three-dimensional model for MEMS with hinged boundary conditions

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Nik, Katerina: On a three-dimensional model for MEMS with hinged boundary conditions. Hannover : Gottfried Wilhelm Leibniz Universität, Diss., 2020, vii, 120 S. DOI: https://doi.org/10.15488/9857

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Sum total of downloads: 322




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Abstract: 
We study a free boundary problem arising from the modeling of an idealized electrostatically actuated MEMS device. In contrast to existing literature, we consider a three-dimensional device involving a hinged elastic plate. The model couples the electrostatic potential to the displacement of the elastic plate, which is caused by a voltage difference that is applied to the device. The electrostatic potential is harmonic in the free domain between the elastic plate and a rigid ground plate. The elastic plate displacement solves a fourth-order parabolic equation with hinged boundary conditions and a right-hand side proportional to the gradient trace of the electrostatic potential on the elastic plate. We establish local and global well-posedness of the model in dependence of the applied voltage difference and show that only touchdown of the elastic plate on the ground plate can generate a finite time singularity. Next, we consider stationary solutions and prove that such solutions exist for small voltage values and do not exist for large voltage values. To prove the nonexistence result, we show that the fourth-order elliptic operator with hinged boundary conditions satisfies a positivity preserving property and has a positive eigenpair.
License of this version: Es gilt deutsches Urheberrecht. Das Dokument darf zum eigenen Gebrauch kostenfrei genutzt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden.
Document Type: DoctoralThesis
Publishing status: publishedVersion
Issue Date: 2020
Appears in Collections:Fakultät für Mathematik und Physik
Dissertationen

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pos. country downloads
total perc.
1 image of flag of Germany Germany 179 55.59%
2 image of flag of United States United States 41 12.73%
3 image of flag of China China 28 8.70%
4 image of flag of Austria Austria 20 6.21%
5 image of flag of Russian Federation Russian Federation 6 1.86%
6 image of flag of Denmark Denmark 6 1.86%
7 image of flag of Brazil Brazil 6 1.86%
8 image of flag of Korea, Republic of Korea, Republic of 3 0.93%
9 image of flag of Italy Italy 3 0.93%
10 image of flag of United Kingdom United Kingdom 3 0.93%
    other countries 27 8.39%

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