The calibration of areal surface topography measuring instruments is of high relevance to estimate the measurement uncertainty and to guarantee the traceability of the measurement results. Calibration structures for optical measuring instruments must be sufficiently small to determine the limits of the instruments. Besides other methods, micro-milling is a suitable process for manufacturing areal material measures. For the manufacturing by micro-milling with ball end mills, the tool radius (effective cutter radius) is the corresponding limiting factor: if the tool radius is too large to penetrate the concave profile details without removing the surrounding material, deviations from the target geometry will occur. These deviations can be detected and excluded before experimental manufacturing with the aid of a kinematic simulation. In this study, a kinematic simulation model for the prediction of the dimensional accuracy of micro-milled areal material measures is developed and validated. Subsequently, a radius study is conducted to determine how the tool radius r of the tool influences the dimensional accuracy of an areal crossed sinusoidal (ACS) geometry according to ISO 25178-70 [1] with a defined amplitude d and period length p. The resulting theoretical surface texture parameters are evaluated and compared to the target values. It was shown that the surface texture parameters deviate from the nominal values depending on the effective cutter radius used. Based on the results of the study, it can be determined with which effective tool radius the measurands Sa and Sq of the material measures are best met. The ideal effective radius for the application considered is between 50 and 75 μm.