Kranz, Christopher; Wyczanowski, Sabrina; Baumann, Ulrike; Weise, Katrin; Klein, Cornelia; Delahaye, Franck; Dullweber, Thorsten; Brendel, Rolf
(Amsterdam : Elsevier, 2013)
Industrial PERC cell process flows typically apply the polishing of the rear side after texturing as well as the edge isolation after POCl3 diffusion. In this paper, we present a novel single step polishing process which ...