Browsing by Subject "Microfabrication"

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  • Feature size below 100 nm realized by UVLED- based microscope projection photolithography 
    Zheng, Lei; Birr, Tobias; Zywietz, Urs; Reinhardt, Carsten; Roth, Bernhard (Changchun : Light Publishing Group, 2023)
    The demand for miniaturization and integration of optical elements has fostered the development of various micro- and nanofabrication technologies. In this work, we developed a low-cost UV-LED-based microscope projection ...
  • Multilayer ion trap technology for scalable quantum computing and quantum simulation 
    Bautista-Salvador, A.; Zarantonello, G.; Hahn, H.; Preciado-Grijalva, A.; Morgner, J.; Wahnschaffe, M.; Ospelkaus, C. (Bristol : Institute of Physics Publishing, 2019)
    We present a novel ion trap fabrication method enabling the realization of multilayer ion traps scalable to an in principle arbitrary number of metal-dielectric levels. We benchmark our method by fabricating a multilayer ...